This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:166945577
rdf:type
prov:Entity
prov:value
Phase shift mask blanks are required to be resistant to chemicals such as acid and alkali solutions in order that the phase angle and the transmittance of the masks from them do not vary while they are indispensably washed with such solutions in the process of processing them into masks.
prov:wasQuotedFrom
n5:com
Subject Item
isap:455762477
prov:wasDerivedFrom
isa:166945577