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isahttp://webisa.webdatacommons.org/
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provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:170984375
rdf:type
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prov:value
The gas having been decomposed by contacting with the harmful component removing catalyst is preferably put through water or an alkaline aqueous solution to remove a water-soluble component contained in the gas, such as hydrogen fluoride.
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Subject Item
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isa:170984375