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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:17350227
rdf:type
prov:Entity
prov:value
First, a gate 305 is formed on a portion of a substrate by depositing a metal such as aluminum (Al), chrome (Cr), molybdenum (Mo), tantalum (Ta), MoTa, etc. on the whole insulating glass substrate and carrying out photolithography as shown in FIG. 6A.
prov:wasQuotedFrom
n5:com
Subject Item
isap:464641368
prov:wasDerivedFrom
isa:17350227
Subject Item
isap:464659359
prov:wasDerivedFrom
isa:17350227
Subject Item
isap:464982474
prov:wasDerivedFrom
isa:17350227