This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:178709011
rdf:type
prov:Entity
prov:value
The silicon is at risk of being recontaminated by contaminants, such as particles or metals, of a type that was removed during a prior phase of the cleaning sequence because of contamination present in subsequent rinsing steps or in chemicals, such as stabilizers for H2 O2, used in the subsequent cleaning steps.
prov:wasQuotedFrom
n5:com
Subject Item
isap:208475393
prov:wasDerivedFrom
isa:178709011
Subject Item
isap:84069931
prov:wasDerivedFrom
isa:178709011