This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:200520562
rdf:type
prov:Entity
prov:value
The present invention relates to interferometric devices and methods for optically analyzing surfaces, for example, such as the surfaces of semiconductor wafers, semiconductor devices, magnetic surfaces, and the like.
prov:wasQuotedFrom
n5:com
Subject Item
isap:477670930
prov:wasDerivedFrom
isa:200520562