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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:201156713
rdf:type
prov:Entity
prov:value
The cut pattern 17 represents a via hole, in which a conductive material, such as doped poly-silicon, tungsten (W), molybdenum (Mo), titanium (Ti), or their silicide (WSi2, MoSi2, TiSi2), is filled in order to connect the horizontal line 11 and the oblique line 13 in the actual semiconductor device.
prov:wasQuotedFrom
n5:com
Subject Item
isap:472452492
prov:wasDerivedFrom
isa:201156713
Subject Item
isap:141651781
prov:wasDerivedFrom
isa:201156713
Subject Item
isap:140447274
prov:wasDerivedFrom
isa:201156713