This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:215776053
prov:wasDerivedFrom
isa:203328887
Subject Item
isa:203328887
rdf:type
prov:Entity
prov:value
A second wafer carrier 51, a third wafer carrier 53, a fourth wafer carrier 55 and a fifth wafer carrier 57 are in storage on the storage locations 25 a, 25 b, 25 c and 25 d, respectively. [0034]FIG. 3 is a top plan view of the load buffer 11 of FIGS. 1 and 2 which shows a preferred footprint of the load buffer
prov:wasQuotedFrom
n5:com
Subject Item
isap:215670104
prov:wasDerivedFrom
isa:203328887