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PrefixNamespace IRI
n4google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:206008855
rdf:type
prov:Entity
prov:value
A positive photoresist composition comprising a polymer, a photoactived agent and a dissolution inhibitor represented by the following formula (1): wherein R1 and R2 each independently is a hydroxyl group, a C1-8 hydroxyalkyl group, or a C3-8 hydroxycycloalkyl group; R3, R4 and R5 each independently is a hydrogen, a C1-8 hydroxyalkyl group, a C1-6 carboxylic acid or a C3-8 carboxylic acid ester; a
prov:wasQuotedFrom
n4:au
Subject Item
isap:140628263
prov:wasDerivedFrom
isa:206008855
Subject Item
isap:141656357
prov:wasDerivedFrom
isa:206008855