This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:206192874
rdf:type
prov:Entity
prov:value
A principal embodiment of the invention is a composition for chemical-mechanical polishing a semiconductor or memory device substrate, comprising: a fluid comprising at least one per-type oxidizer that produces free radicals, preferably an Oxygen/Hydroxyl Free Radical, when contacted with at least one activator, wherein the activator is one or more transition metals that promote production of the
prov:wasQuotedFrom
n4:com
Subject Item
isap:315413609
prov:wasDerivedFrom
isa:206192874