This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:206514119
rdf:type
prov:Entity
prov:value
piecesUS689024418 Sep 200310 May 2005Freudenberg Nonwovens Limited PartnershipPolishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particlesUS689333230 Aug 200417 May 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS692225315 Jul 2
prov:wasQuotedFrom
n5:au
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:206514119
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:206514119