This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:464017592
prov:wasDerivedFrom
isa:211087618
Subject Item
isa:211087618
rdf:type
prov:Entity
prov:value
R1 x SiH4-x (where R1 is a phenyl group or a vinyl group; and x is an integer of 1 to 3), the proportion of SiCH3 contained in the interlayer insulating film is much lower than contained in a conventional organic SOG film, though the dielectric constant thereof is equal to that of the conventional organic SOG film.
prov:wasQuotedFrom
n5:com
Subject Item
isap:130980806
prov:wasDerivedFrom
isa:211087618