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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:212926046
rdf:type
prov:Entity
prov:value
A metal layer selected from Pt, Ti, Ta, W, Mo and other metals is deposited on top of this n type region 12 by an evaporation-deposition technique.
prov:wasQuotedFrom
n5:es
Subject Item
isap:131315628
prov:wasDerivedFrom
isa:212926046
Subject Item
isap:464659360
prov:wasDerivedFrom
isa:212926046
Subject Item
isap:464635628
prov:wasDerivedFrom
isa:212926046