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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:213750301
rdf:type
prov:Entity
prov:value
A conductive plug filling a via hole is typically formed by depositing an interdielectric layer on a conductive layer comprising at least one conductive pattern, forming an opening through the interdielectric layer by conventional photolithographic and etching techniques, and filling the opening with a conductive material, such as tungsten (W).
prov:wasQuotedFrom
n4:com
Subject Item
isap:472452492
prov:wasDerivedFrom
isa:213750301