This HTML5 document contains 10 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:230807974
rdf:type
prov:Entity
prov:value
The resulting structure can be seen in FIG. 3H. Suitable fill metals include aluminum, aluminum alloys, copper, copper alloys, tantalum, tungsten, titanium or other metals or mixtures thereof as typically employed in the formation of microelectronic devices.
prov:wasQuotedFrom
n5:com
Subject Item
isap:345894077
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:363606097
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:122776852
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:446426710
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:342379028
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:359660454
prov:wasDerivedFrom
isa:230807974
Subject Item
isap:358765996
prov:wasDerivedFrom
isa:230807974