This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:24049797
rdf:type
prov:Entity
prov:value
A further important advantage of the present invention is that the stress of the deposited inorganic film can be varied, depending on the parameters such as the microwave power and gas pressure.
prov:wasQuotedFrom
n5:com
Subject Item
isap:339540134
prov:wasDerivedFrom
isa:24049797
Subject Item
isap:183775682
prov:wasDerivedFrom
isa:24049797