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Still further, carbon such as diamond, Fullerene (C2n), carbon nano-tube and the like or metal carbide such as Al4C3, B4C, CaC2, Cr3C2, Mo2C, MoC, NbC, SiC, TaC, TiC, VC, W2C, WC, ZrC and the like are also effective as the dielectric material of the insulator layer 13.
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