This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:25433184
rdf:type
prov:Entity
prov:value
ing solutionsUS695800113 Dec 200425 Oct 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS696930619 Aug 200429 Nov 2005Micron Technology, Inc.Apparatus for planarizing microelectronic workpiecesUS6976902 *21 May 200420 Dec 2005Samsung Electronics Co., Ltd.Chemical mechanical polishing apparatusU
prov:wasQuotedFrom
n5:au
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:25433184
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:25433184