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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:261875497
rdf:type
prov:Entity
prov:value
The apparatus according to the invention shows some improvements for the transport system towards and from particular modules, in which complicated processings under high vacuum take place and is mainly characterized by including means to at least locally establish an independent transport of the substrates by means of flowing gaseous medium, moving along these substrates.
prov:wasQuotedFrom
n5:com
Subject Item
isap:366568016
prov:wasDerivedFrom
isa:261875497