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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:264183123
rdf:type
prov:Entity
prov:value
P-type dopants such as boron (B) or boron difluoride (BF2) may be implanted within opening 168 at an angle ?????? within a range of about 5 to about 40 degrees, depending on the gate stack height, the spacing between the gate stacks and the minimum gate length.
prov:wasQuotedFrom
n5:com
Subject Item
isap:54317827
prov:wasDerivedFrom
isa:264183123