This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:265076865
rdf:type
prov:Entity
prov:value
n 11, 2005Applied Materials Inc.Method and apparatus for substrate polishingUS6841991Aug 29, 2002Jan 11, 2005Micron Technology, Inc.Planarity diagnostic system, E.G., for microelectronic component test systemsUS6860798Aug 8, 2002Mar 1, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6866566Aug
prov:wasQuotedFrom
n5:com
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:265076865
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:265076865