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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:266841066
rdf:type
prov:Entity
prov:value
An advantageous further development of the invention provides that the application of the SiO2 layer 11, FIGS. 4-8, and 13, FIGS. 9 and 10, proceeds by means of thermal oxidation after etching of the poly-Si-2 layer, whereby, due to the fact that the layer thickness at the edges becomes relatively large, the degree of the cited insignificant overlapping between ends such as A and B, FIG. 6, is fur
prov:wasQuotedFrom
n4:com
Subject Item
isap:450108063
prov:wasDerivedFrom
isa:266841066