This HTML5 document contains 9 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:429792566
prov:wasDerivedFrom
isa:266961320
Subject Item
isap:434430445
prov:wasDerivedFrom
isa:266961320
Subject Item
isap:47465670
prov:wasDerivedFrom
isa:266961320
Subject Item
isap:319170264
prov:wasDerivedFrom
isa:266961320
Subject Item
isap:275639749
prov:wasDerivedFrom
isa:266961320
Subject Item
isa:266961320
rdf:type
prov:Entity
prov:value
In a preferred embodiment, the solid substrate can be made from a wide variety of materials, including, but not limited to, silicon such as silicon wafers, silcon dioxide, silicon nitride, glass and fused silica, gallium arsenide, indium phosphide, aluminum, ceramics, polyimide, quartz, plastics, resins and polymers including polymethylmethacrylate, acrylics, polyethylene, polyethylene terepthalat
prov:wasQuotedFrom
n5:fr
Subject Item
isap:34899397
prov:wasDerivedFrom
isa:266961320