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In these drawings, numeral 50 designates a substrate made of a material such as Cu, Ni, Cr, Si, stainless steel, copal (polystyrene), polyimid and so on, numerals 51 and 52 designate insulating layers made of a heat-resisting material such as MgO, SiO2, Ta2 O5, Si3 N4, Al2 O3 and so on, and numerals 53 and 54 designate a heating layer and a heat-receiving (sensing) layer, respectively, made of mat
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