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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:362980095
prov:wasDerivedFrom
isa:267444770
Subject Item
isa:267444770
rdf:type
prov:Entity
prov:value
ng said resist film after the pattern exposure wherein said based polymer is an ??-methylstyrene derivative: General Formula 9: General Formula 10: wherein R0 is an alkyl group; R1 is a group that is decomposed through irradiation of light; and R3 and R4 are the same or different and selected from the group consisting of hydrogen and compounds including hydrogen and carbon; at least one of R5 and
prov:wasQuotedFrom
n5:com
Subject Item
isap:57438858
prov:wasDerivedFrom
isa:267444770