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provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:268329795
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prov:Entity
prov:value
A fin structure is formed between the source and the drain, the fin structure including a first region formed in a channel area of the fin structure and a second and third protective region formed adjacent the source and drain, respectively, wherein the first region is narrower than the second and third protective regions.
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n4:com
Subject Item
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isa:268329795