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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:280356491
rdf:type
prov:Entity
prov:value
Next, on the Al selectively deposited by the sputtering method and the insulating film, Al or a metal film composed mainly of Al is non-selectively formed.
prov:wasQuotedFrom
n4:com
Subject Item
isap:55189401
prov:wasDerivedFrom
isa:280356491
Subject Item
isap:332533331
prov:wasDerivedFrom
isa:280356491