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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:287170948
rdf:type
prov:Entity
prov:value
The conductive material of the plug, bit line and word line can be tungsten, copper, aluminum or other materials and combinations deemed suitable in the art for plug and lines structures generally.
prov:wasQuotedFrom
n5:com
Subject Item
isap:62320232
prov:wasDerivedFrom
isa:287170948
Subject Item
isap:82737298
prov:wasDerivedFrom
isa:287170948
Subject Item
isap:451521797
prov:wasDerivedFrom
isa:287170948
Subject Item
isap:98962642
prov:wasDerivedFrom
isa:287170948