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The catalyst preferably is a metal selected from the group consisting of platinum, silver, palladium, copper, rhodium, nickel, and...http://www.google.com/patents/US6030425?utm_source=gb-gplus-sharePatent US6030425 - Catalytic acceleration and electrical bias control of CMP processingAdvanced Patent SearchPublication numberUS6030425 APublication typeGrantApplication numberUS 09/300,823Publication
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