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isa:306617501
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The principles involved in this invention can be applied to various types of disordered carbon films, for example characterized by thickness, e.g. from several tens of angstroms thick, or thick films e.g. several tens of microns thick, or to the intended application of the film as an abrasion resistant coating, a corrosion resistant coating, or a coating including a wide band gap coating, film, or
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