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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:307300926
rdf:type
prov:Entity
prov:value
This is performed by forming photo resist over the structure except for where the trenches are to be formed, followed by a dry etch (e.g. RIE) with a relatively soft mask material that is laterally etched as the trench is formed (e.g. etch rate of less than about 2 to 1, versus an etch rate of traditional mask materials that is typically greater than 5 to 1), such that trench 38 is formed with slo
prov:wasQuotedFrom
n4:ca
Subject Item
isap:422899621
prov:wasDerivedFrom
isa:307300926