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PrefixNamespace IRI
n5patentgenius.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:326728086
rdf:type
prov:Entity
prov:value
The method for etching is not particularly limited, and for example, when thepeel-off layer 721 is formed to include silicon, the peel-off layer 721 can be removed with the use of ClF.sub.3 gas, a gas such as b
prov:wasQuotedFrom
n5:com
Subject Item
isap:450090891
prov:wasDerivedFrom
isa:326728086