This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:335827963
rdf:type
prov:Entity
prov:value
Preferably, first material is selected from a group of silicon dioxide, silicon nitride, doped silicon dioxide, aluminum oxide, aluminum nitride, silicon carbide, polymer, and other electrically insulating materials.
prov:wasQuotedFrom
n5:ca
Subject Item
isap:47681405
prov:wasDerivedFrom
isa:335827963
Subject Item
isap:47793092
prov:wasDerivedFrom
isa:335827963