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, 2014Nec Display Solutions, Ltd.Lighting apparatus including a light source, a first mirror, and a second mirror disposed between the light source and the first mirrorUS8675177Sep 20, 2007Mar 18, 2014Nikon CorporationExposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas* Cited by examinerClassificatio
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