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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:348285402
rdf:type
prov:Entity
prov:value
Referring to FIG. 1, a lower electrode 10 in a capacitor according to the embodiment of the present invention is formed of a refractory metal such as Ti, Ta and W or a refractory metal compound such as TiN, TiSiN, TiAlN, TaN, TaSiN, TaAlN and WN. In particular, when the lower electrode 10 has a three-dimensional structure such as a cylindrical shape, a refractory metal or refractory metal compound
prov:wasQuotedFrom
n4:es
Subject Item
isap:464635632
prov:wasDerivedFrom
isa:348285402