This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

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PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:349558505
rdf:type
prov:Entity
prov:value
ediaUS714151321 Oct 200428 Nov 2006Wafermasters, Inc.Integrated ashing and implant annealing method using ozoneUS7237561 *16 Oct 20033 Jul 2007Samsung Electronics Co., Ltd.Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the sameUS7514015 *29 Nov 20047 Apr 2009Uvtech SystemsMethod for surface cleaningUS793526627 Dec 20073 May 201
prov:wasQuotedFrom
n5:au
Subject Item
isap:319647320
prov:wasDerivedFrom
isa:349558505