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Here, metal, such as gold-plated nickel (Ni), gold (Au), palladium (Pd), or tantalum (Ta), and a perfluoronated alkane and silane compound with a high hydrophobic property, such as Fluorinated Carbon (FC), F-Silane, or Diamond Like Carbon (DLC), are used for the hydrophobic coating layer 19. [0010] The hydrophobic coating layer 19 may be formed by a wetting method, such as a spray coating method o
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