This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:351256715
rdf:type
prov:Entity
prov:value
emens AktiengesellschaftTwo layers with different solubilities in solventsUS6608343Dec 5, 2001Aug 19, 2003Micron Technology, Inc.Rough (high surface area) electrode from Ti and TiN, capacitors and semiconductor devices including sameUS6613240Dec 1, 2000Sep 2, 2003Epion CorporationMethod and apparatus for smoothing thin conductive films by gas cluster ion beamUS6617250Sep 13, 2002Sep 9, 2003Micron
prov:wasQuotedFrom
n5:com
Subject Item
isap:132349032
prov:wasDerivedFrom
isa:351256715