This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
n4patents.
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:35588393
rdf:type
prov:Entity
prov:value
to accumulate on the walls of the reaction tube and the support mainly during the process of the epitaxial growth of Si which is to be performed at very high temperature.
prov:wasQuotedFrom
n4:com
Subject Item
isap:429395245
prov:wasDerivedFrom
isa:35588393