This HTML5 document contains 7 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:481320376
prov:wasDerivedFrom
isa:359267491
Subject Item
isa:359267491
rdf:type
prov:Entity
prov:value
In the present invention, when the amorphous layer is constituted of a-Si (H,X), typical examples of halogen atoms (X) to be incorporated in the amorphous layer are fluorine, chlorine, bromine and iodine, especially preferably fluorine and chlorine.
prov:wasQuotedFrom
n5:com
Subject Item
isap:57970042
prov:wasDerivedFrom
isa:359267491
Subject Item
isap:481391055
prov:wasDerivedFrom
isa:359267491
Subject Item
isap:57878666
prov:wasDerivedFrom
isa:359267491