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PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
n5google.co.
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:359760318
rdf:type
prov:Entity
prov:value
Because visual information about semiconductor defects is vast, multidimensional, and, in many cases, globally distnbuted, the method of storing and retrieving information and images about defects from the defect knowledge-base 50 and the defect image file 54 is a significant factor in providing rapid access and retrieval.
prov:wasQuotedFrom
n5:uk
Subject Item
isap:142777327
prov:wasDerivedFrom
isa:359760318
Subject Item
isap:386292463
prov:wasDerivedFrom
isa:359760318