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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:361570942
rdf:type
prov:Entity
prov:value
The given conditions may relate to the optical and operational parameters of the microlithography system that will be used, the type of photoresist within which the contact holes or other features will be formed, and the design criteria, limits or tolerances on the geometry of the features to be formed in the photoresist.
prov:wasQuotedFrom
n4:com
Subject Item
isap:5772852
prov:wasDerivedFrom
isa:361570942