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isa:367673692
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The breaking member 13 includes, for example, eight (six in FIG. 1C) flat squeegees each being adapted to move by a corresponding fixed cylinder totally made of synthetic resin such as Teflon (trade name), Viton (trade name) or a like, and is disposed at an upper place above the adsorption table 12 in a state where it can ascend and descend freely.
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isap:85091530
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isa:367673692