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PrefixNamespace IRI
n4google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:370711324
rdf:type
prov:Entity
prov:value
For example, a Reactive Ion Etch (RIE) using halogens such as chlorine- or fluorine-based chemistries would also remove portions of conductive material 23 and coating 27 through a chemical process.
prov:wasQuotedFrom
n4:au
Subject Item
isap:344381729
prov:wasDerivedFrom
isa:370711324