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Patent CitationsCited PatentFiling datePublication dateApplicantTitleUS3930857 *May 3, 1973Jan 6, 1976International Business Machines CorporationResist processUS4579812 *Feb 3, 1984Apr 1, 1986Advanced Micro Devices, Inc.Process for forming slots of different types in self-aligned relationship using a latent image maskUS4702792 *Oct 28, 1985Oct 27, 1987International Business Machines CorporationApp
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