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Materials that can be used for the anti-fuse layer, and that can be grown and/or deposited, include; silicon dioxide, silicon nitride, silicon oxynitride, amorphous carbon and other insulating materials or combinations of materials. (Also an undoped layer of silicon may be used for the anti-fuse layer.) Two additional layers are then formed: a lightly-doped silicon layer 121 doped with a conductiv
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