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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:380117907
rdf:type
prov:Entity
prov:value
Many of the embodiments described herein are advantageously performed utilizing temperatures of less than about 550??? C. Although some examples of the processes are described with reference to a single wafer thermal-chemical vapor deposition chamber (e.g., process chamber 1100 illustrated in FIG. 7), other processes may be beneficially practiced in other deposition systems, such as a batch chambe
prov:wasQuotedFrom
n5:com
Subject Item
isap:26582486
prov:wasDerivedFrom
isa:380117907