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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:382747414
rdf:type
prov:Entity
prov:value
nitions are given. [0049] A lithography device refers to any device that utilizes an image, such as a mask, to transfer a pattern to and optionally into a substrate.
prov:wasQuotedFrom
n4:es
Subject Item
isap:32077120
prov:wasDerivedFrom
isa:382747414