This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:412063965
rdf:type
prov:Entity
prov:value
Thus, the type of dielectric and other materials involved and the processing steps to be used in device fabrication will determine thermal budgets and the choice of available silicides.
prov:wasQuotedFrom
n5:com
Subject Item
isap:459578288
prov:wasDerivedFrom
isa:412063965