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Subject Item
isa:420177323
rdf:type
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prov:value
An arcuate guide member 25 conforming to the peripheral edge of the wafer W is provided which, together with a stopper member 26, ensures the alignment of the wafer W. The wafer W is placed just on the tweezers in such a state as shown in FIG. 4A at which time it is neither aligned in a correct position nor vacuum-sucked.
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isap:464150523
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isa:420177323