This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:438337397
rdf:type
prov:Entity
prov:value
In embodiments such as when there is a significant amount of high dielectric constant residues within the reactor, one can employ the first gas mixture comprising the boron-containing reactive agent in the first step over an extended period of time to remove the high dielectric constant residues.
prov:wasQuotedFrom
n4:fr
Subject Item
isap:255607138
prov:wasDerivedFrom
isa:438337397